Scanning Electron Microscopes
LEO 1525
The LEO 1525 is a high resolution FE-SEM. The field emission gun allows the user to produce a small probe with high current density for better resolution and enhanced microanalysis. The microscope is equipped with an Energy Dispersive X-Ray Spectrometer for elemental microanalysis. The microscope has a standard SE detector for topographic imaging and an in-lens detector for surface specific imaging. The microscope may be run at accelerating voltages from 0.5kV to 20kV and the resolution of the microscope is 1.5nm at 20kV and 3.5nm at 1kV.